Cutting Carbon in MEMS Wafer Drying We’ve been swapping out those old, clunky convection ovens for infrared (IR) heating lamps when drying our MEMS...

Introduction We built these infrared heating lamps with one place in mind: the fab. Because when you’re running an energy audit, you need heat...

Watch a wafer come off the wet station. If the drying lamp is lagging, you’ll see moisture hang around, and then the photoresist starts lifting....